posted on 2017-12-06, 00:00authored byMinmei LiMinmei Li, Xiaolong Fan, Brijesh Verma, Ronald Balsys, D O'Connor
Ion backscattering spectrometry is an analysis technology that is dedicated to the compositional analysis of samples with the thickness of μm level. The problem of spectral data analysis, which is to determine the sample structure from the measured spectra, is generally ill-posed. In this study, artificial neural network (ANN) techniques have been developed for spectral data analysis. A multilayer feedforward neural network was constructed and applied to the specific case of SiGe thin films on a silicon substrate. The network was trained by the resilient backpropagation algorithm with hundreds of simulated spectra of samples for which the structures are known. Then the trained network was applied to analyse spectra with unknown structure of samples. The ANN prediction results are excellent. The constructed neural network can handle properly redundancies, which were caused by the constraint of output variables.
Funding
Category 1 - Australian Competitive Grants (this includes ARC, NHMRC)
History
Start Page
1
End Page
7
Number of Pages
7
Start Date
2005-01-01
ISBN-10
1932415661
Location
Las Vegas, USA
Publisher
CSREA Press
Place of Publication
Las Vegas
Peer Reviewed
Yes
Open Access
No
Era Eligible
Yes
Name of Conference
International Conference on Artificial Intelligence