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Transmission electron microscopy (TEM) characterisation of thermally grown RuO2 thin films

conference contribution
posted on 2017-12-06, 00:00 authored by Kin Hung Pang, M Blackford, E Jelenkovic
RuO2 thin film fabricated by rf- sputtering from a pure Ru target and subsequently oxidized at 600C 30 minutes under O2/N2 gas was studied by transmission electron microscopy (TEM). The un-oxidized Ru grains are found at the bottom of the film in broken segments; whereas the oxidized RuO2 grains are found on top of the Ru grains but are frequently in direct contact with the SiO2 layer. The observations partially support the work function measurement of such films in a previous study.

Funding

Category 2 - Other Public Sector Grants Category

History

Parent Title

NCTA 2009 : 16th AINSE Conference on Nuclear and Complementary Techniques of Analysis, 25 - 27 November 2009, Lucas Heights, Sydney.

Start Page

1

End Page

4

Number of Pages

4

Start Date

2009-01-01

Location

Lucas Heights, Sydney, Australia

Publisher

AINSE

Place of Publication

Australia

Full Text URL

Peer Reviewed

  • Yes

Open Access

  • No

External Author Affiliations

Australian Nuclear Science and Technology Organisation; Hong Kong Polytechnic University; Process Engineering and Light Metals;

Era Eligible

  • Yes

Name of Conference

AINSE. Conference on Nuclear and Complementary Techniques of Analysis

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    Categories

    Keywords

    RuO2Transmission electron microscopy (TEM)Nanoscale Characterisation

    Licence

    CQUniversity General 1.0

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