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Principal component analysis and neural networks for analysis of complex spectral data from ion backscattering

conference contribution
posted on 06.12.2017, 00:00 by Minmei LiMinmei Li, Xiaolong FanXiaolong Fan, Kevin TickleKevin Tickle
The problem of ion backscattering spectral data analysis, which is to determine the physical structure of a sample from the measured spectra, was studied with neural network techniques. A new method based on principal component analysis was proposed to compress the number of nodes in the input layer so that the dimensionality of spectral data was significantly reduced. This provides a fast convergence within reasonable size of training set. The constructed neural network was applied to some computation examples, in which backscattering spectra from SiGe thin films on a silicon substrate were discussed in details. The network was trained by the resilient backpropagation algorithm with hundreds of simulated spectra of samples for which the structures were known. The trained network also was tested to analyse spectra with unknown structure of samples. The neural network prediction results were accurate within error of 5.5% and this may suggest that the approach of combining neural network and principal component analysis could be a potential tool of analysis and prediction for non-experts. The proposed approach can handle properly redundancies, which were caused by the constraint of output variables.

Funding

Category 1 - Australian Competitive Grants (this includes ARC, NHMRC)

History

Start Page

228

End Page

234

Number of Pages

7

Start Date

01/01/2006

ISBN-10

0889865582

Location

Innsbruck, Austria

Publisher

ACTA Press

Place of Publication

Calgary, Canada

Peer Reviewed

Yes

Open Access

No

External Author Affiliations

Faculty of Informatics and Communication; TBA Research Institute;

Era Eligible

Yes

Name of Conference

International Conference on Artificial Intelligence and Applications